Annals of Occupational and Environmental Medicine

Original Article

Review on Potential Risk Factors in Wafer Fabrication Process of Semiconductor Industry: Dong Uk Park, Hyae Jeong Byun, Sang Jun Choi, Jee Yeon Jeong, Chung Sik Yoon, Chi Nyon Kim, Kwon Chul Ha, Doo Yong Park; Korean Journal of Occupational and Environmental Medicine 2011;23(3):333-342. Published online September 30, 2011; DOI: https://doi.org/10.35371/kjoem.2011.23.3.333

OBJECTIVES
To associate work in the semiconductor industry, including silicon wafer fabrication, with cancer risks or mortality and other adverse health effects, the operation of wafer fabrication should initially be understood. A detailed study on the fabrication operation allows retrospective exposure to be assessed and wafer fabrication workers to be classified into similar exposure groups. Therefore, the objective of this study was to comprehensively review silicon wafer fabrication operations and related hazardous materials and agents.
METHODS
The literatures related to semiconductor industry processes were reviewed from an occupational health viewpoint based on wafer manufacturing, wafer fabrication and packaging. The focus was especially related to the hazardous materials used in wafer fabrication industries.
RESULTS
During the fabrication of silicon wafers, many toxic chemicals, a strong electric field and hazardous equipment are used. The process allows the integration of a three-dimensional array of electric circuits onto a silicon wafer substrate. Wafers are sliced from single crystal silicon and subject to a series of steps during the fabrication process, which alternatively adds and then selectively removes materials in layers from the surface of the wafer to create different parts of the completed integrated circuit. There are four major steps in this process; patterning, junction formation, thin film and metallization.
CONCLUSIONS
In order to associate exposure to the hazard agents generated during wafer fabrication operations with adverse health effects the details of the operation should be completely studied, which will be helpful in both exposure assessments and epidemiological studies.

Citations

Citations to this article as recorded by

Assessment of Occupational Health Risks for Maintenance Work in Fabrication Facilities: Brief Review and Recommendations
Dong-Uk Park, Kyung Ehi Zoh, Eun Kyo Jeong, Dong-Hee Koh, Kyong-Hui Lee, Naroo Lee, Kwonchul Ha
Safety and Health at Work.2024; 15(1): 87. CrossRef
Sintering of silver nanoparticle structures and the pursuit of minimum resistivity
Arif Hussain, Hee Lak Lee, Seung Jae Moon
Materials Today Communications.2023; 34: 105159. CrossRef
Lymphohematopoietic cancer mortality among Korean semiconductor manufacturing workers
Dong-Wook Lee, Sooyoung Cho, Aesun Shin
BMC Public Health.2023;[Epub] CrossRef
Temperature Estimation during Pulsed Laser Sintering of Silver Nanoparticles
Arif Hussain, Hee-Lak Lee, Yoon-Jae Moon, Heuiseok Kang, Seung-Jae Moon, Jun-Young Hwang
Applied Sciences.2022; 12(7): 3467. CrossRef
Stepwise Current Increment Sintering of Silver Nanoparticle Structures
Dongkeun Kim, Arif Hussain, Hee-Lak Lee, Yoon-Jae Moon, Junyoung Hwang, Seung-Jae Moon
Crystals.2021; 11(10): 1264. CrossRef
Chemical use in the semiconductor manufacturing industry
Sunju Kim, Chungsik Yoon, Seunghon Ham, Jihoon Park, Ohun Kwon, Donguk Park, Sangjun Choi, Seungwon Kim, Kwonchul Ha, Won Kim
International Journal of Occupational and Environmental Health.2018; 24(3-4): 109. CrossRef
Comparative Analysis between Direct-reading Meter of PID and GC-FID using the Active Type Air Sampler for VOCs Measurement
Jin-Hee Yeo, Kwang-Min Choi
Journal of Korean Society of Occupational and Environmental Hygiene.2016; 26(3): 301. CrossRef
Review of Hazardous Agent Level in Wafer Fabrication Operation Focusing on Exposure to Chemicals and Radiation
Donguk Park
Journal of Korean Society of Occupational and Environmental Hygiene.2016; 26(1): 1. CrossRef
Clean Room Structure, Air Conditioning and Contamination Control Systems in the Semiconductor Fabrication Process
Kwang-Min Choi, Ji-Eun Lee, Kwi-Young Cho, Kwan-Sick Kim, Soo-Hun Cho
Journal of Korean Society of Occupational and Environmental Hygiene.2015; 25(2): 202. CrossRef
A Design of the Ontology-based Situation Recognition System to Detect Risk Factors in a Semiconductor Manufacturing Process
Seung-Min Baek, Min-Ho Jeon, Chang-Heon Oh
The Journal of Korea Navigation Institute.2013; 17(6): 804. CrossRef
Occupational Cancers with Chemical Exposure and their Prevention in Korea: A Literature Review
Kyung-Taek Rim
Asian Pacific Journal of Cancer Prevention.2013; 14(6): 3379. CrossRef
Ecotoxicity Estimation of Hazardous Air Pollutants Emitted from Semiconductor Manufacturing Processes Utilizing QSAR
Hyung-Geun Park, Min-Kyeong Yeo
Bulletin of the Korean Chemical Society.2013; 34(12): 3755. CrossRef
Leukemia and non-Hodgkin lymphoma in semiconductor industry workers in Korea
Inah Kim, Hyun J. Kim, Sin Y. Lim, Jungok Kongyoo
International Journal of Occupational and Environmental Health.2012; 18(2): 147. CrossRef

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Original Article

The Effect of a Stretching Exercise on Myofascial Pain Syndrome Patients in Small and Medium Sized Industries: Jung Wook Lim, Young Jun Kwon, Tae Won Jang, Jong Heon Lee, In Seok Kim, Sang Cheol Ryu, Jae Hoon Roh, Jong Uk Won, Bong Suk Cha, Chul Ho Lee; Korean Journal of Occupational and Environmental Medicine 2010;22(4):307-315. Published online December 31, 2010; DOI: https://doi.org/10.35371/kjoem.2010.22.4.307

Abstract PDF

OBJECTIVES
This study was conducted to identify the effect of a stretching exercise on myofascial pain syndrome patients that work in small and medium-sized industry.
METHODS
Questionnaires surveys including general characteristics, work-related characteristics, and musculoskeletal symptoms on neck and shoulder area was administered to 393 subjects who worked in small and medium sized industries. Symptomatic workers were examined to identify whether they had myofascial pain syndrome (MPS). Of the 393 subjects, 108 MPS patients performed 6 weeks stretching exercise program. Intensity of pain was estimated with visual analogue scales (VAS). All patients were interviewed to estimate their compliance to stretching exercise program.
RESULTS
Of the 393 workers, 119 workers were diagnosed with MPS of the neck and shoulder. Post-exercise VAS was significantly reduced compared to pre-exercise VAS (p<0.05). High compliance patients to stretching exercise were more effective to exercise therapy (OR 2.89, 95% CI 1.19~7.04), and overtime workers were less effective to exercise therapy (OR 0.41, 95% CI 0.17~0.95).
CONCLUSION
The Stretching exercise program was identified to be effective in MPS patients in small and medium-sized industries. It is recommended that workers with MPS in small and medium-sized industries practice a well-designed stretching exercise program, and avoid overtime work.

Citations

Citations to this article as recorded by

Effect of Resistance Exercise Program for Middle-Aged Women with Myofascial Pain Syndrome on Shoulder Pain, Angle of Shoulder Range of Motion, and Body Composition Randomized Controlled Trial, RCT
WonJong Kim, Myung-Haeng Hur
Journal of Korean Academy of Nursing.2020; 50(2): 286. CrossRef
Related Factors to Musculoskeletal Discomfort Symptoms on Some Middle·High school Teachers
Jae-Yoon Lee, Byeong-Yeon Moon, Youn-Hong Jeong, Hyun-Kyung Woo
Journal of the Korea Academia-Industrial cooperation Society.2012; 13(1): 264. CrossRef
The Effects of Stabilization Exercise and Stretching Exercise on Muscle Strength and Pain of Patients with Lower Back Pain
Kwang-Il Kwag, Jae-Heon Lim
Journal of the Korean Academy of Clinical Electrophysiology.2011; 9(2): 39. CrossRef

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