Annals of Occupational and Environmental Medicine

Dong Uk Park

3 Articles

Review on Potential Risk Factors in Wafer Fabrication Process of Semiconductor Industry: Dong Uk Park, Hyae Jeong Byun, Sang Jun Choi, Jee Yeon Jeong, Chung Sik Yoon, Chi Nyon Kim, Kwon Chul Ha, Doo Yong Park; Korean Journal of Occupational and Environmental Medicine 2011;23(3):333-342. Published online September 30, 2011; DOI: https://doi.org/10.35371/kjoem.2011.23.3.333

OBJECTIVES
To associate work in the semiconductor industry, including silicon wafer fabrication, with cancer risks or mortality and other adverse health effects, the operation of wafer fabrication should initially be understood. A detailed study on the fabrication operation allows retrospective exposure to be assessed and wafer fabrication workers to be classified into similar exposure groups. Therefore, the objective of this study was to comprehensively review silicon wafer fabrication operations and related hazardous materials and agents.
METHODS
The literatures related to semiconductor industry processes were reviewed from an occupational health viewpoint based on wafer manufacturing, wafer fabrication and packaging. The focus was especially related to the hazardous materials used in wafer fabrication industries.
RESULTS
During the fabrication of silicon wafers, many toxic chemicals, a strong electric field and hazardous equipment are used. The process allows the integration of a three-dimensional array of electric circuits onto a silicon wafer substrate. Wafers are sliced from single crystal silicon and subject to a series of steps during the fabrication process, which alternatively adds and then selectively removes materials in layers from the surface of the wafer to create different parts of the completed integrated circuit. There are four major steps in this process; patterning, junction formation, thin film and metallization.
CONCLUSIONS
In order to associate exposure to the hazard agents generated during wafer fabrication operations with adverse health effects the details of the operation should be completely studied, which will be helpful in both exposure assessments and epidemiological studies.

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Assessment of Occupational Health Risks for Maintenance Work in Fabrication Facilities: Brief Review and Recommendations
Dong-Uk Park, Kyung Ehi Zoh, Eun Kyo Jeong, Dong-Hee Koh, Kyong-Hui Lee, Naroo Lee, Kwonchul Ha
Safety and Health at Work.2024; 15(1): 87. CrossRef
Sintering of silver nanoparticle structures and the pursuit of minimum resistivity
Arif Hussain, Hee Lak Lee, Seung Jae Moon
Materials Today Communications.2023; 34: 105159. CrossRef
Lymphohematopoietic cancer mortality among Korean semiconductor manufacturing workers
Dong-Wook Lee, Sooyoung Cho, Aesun Shin
BMC Public Health.2023;[Epub] CrossRef
Temperature Estimation during Pulsed Laser Sintering of Silver Nanoparticles
Arif Hussain, Hee-Lak Lee, Yoon-Jae Moon, Heuiseok Kang, Seung-Jae Moon, Jun-Young Hwang
Applied Sciences.2022; 12(7): 3467. CrossRef
Stepwise Current Increment Sintering of Silver Nanoparticle Structures
Dongkeun Kim, Arif Hussain, Hee-Lak Lee, Yoon-Jae Moon, Junyoung Hwang, Seung-Jae Moon
Crystals.2021; 11(10): 1264. CrossRef
Chemical use in the semiconductor manufacturing industry
Sunju Kim, Chungsik Yoon, Seunghon Ham, Jihoon Park, Ohun Kwon, Donguk Park, Sangjun Choi, Seungwon Kim, Kwonchul Ha, Won Kim
International Journal of Occupational and Environmental Health.2018; 24(3-4): 109. CrossRef
Comparative Analysis between Direct-reading Meter of PID and GC-FID using the Active Type Air Sampler for VOCs Measurement
Jin-Hee Yeo, Kwang-Min Choi
Journal of Korean Society of Occupational and Environmental Hygiene.2016; 26(3): 301. CrossRef
Review of Hazardous Agent Level in Wafer Fabrication Operation Focusing on Exposure to Chemicals and Radiation
Donguk Park
Journal of Korean Society of Occupational and Environmental Hygiene.2016; 26(1): 1. CrossRef
Clean Room Structure, Air Conditioning and Contamination Control Systems in the Semiconductor Fabrication Process
Kwang-Min Choi, Ji-Eun Lee, Kwi-Young Cho, Kwan-Sick Kim, Soo-Hun Cho
Journal of Korean Society of Occupational and Environmental Hygiene.2015; 25(2): 202. CrossRef
A Design of the Ontology-based Situation Recognition System to Detect Risk Factors in a Semiconductor Manufacturing Process
Seung-Min Baek, Min-Ho Jeon, Chang-Heon Oh
The Journal of Korea Navigation Institute.2013; 17(6): 804. CrossRef
Occupational Cancers with Chemical Exposure and their Prevention in Korea: A Literature Review
Kyung-Taek Rim
Asian Pacific Journal of Cancer Prevention.2013; 14(6): 3379. CrossRef
Ecotoxicity Estimation of Hazardous Air Pollutants Emitted from Semiconductor Manufacturing Processes Utilizing QSAR
Hyung-Geun Park, Min-Kyeong Yeo
Bulletin of the Korean Chemical Society.2013; 34(12): 3755. CrossRef
Leukemia and non-Hodgkin lymphoma in semiconductor industry workers in Korea
Inah Kim, Hyun J. Kim, Sin Y. Lim, Jungok Kongyoo
International Journal of Occupational and Environmental Health.2012; 18(2): 147. CrossRef

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A Case of Hypersensitivity Pneumonitis in a Worker Exposed to Metal Working Fluid: Sun Wung Lee, Dong hee Ko, Ku Won Chin, Dong Uk Park, Jung Tak Lee, Yoon Hee Song, Sang Yoon Lee; Korean Journal of Occupational and Environmental Medicine 2008;20(1):37-45. Published online March 31, 2008; DOI: https://doi.org/10.35371/kjoem.2008.20.1.37

Abstract PDF

INTRODUCTION: There have been no reports of hypersensitivity pneumonitis caused by metal working fluids in Korea, despite their existence in other countries. Here, we report the first such case, along with an assessment of work-relatedness through exposure assessment.
CASE
REPORT: A 64-year old male patient visited the hospital with dyspnea after metal pipe cutting for about a year. He was diagnosed with hypersensitivity pneumonitis from the evidence of specific exposure history, clinical symptoms, and radiologic findings. The air exposure levels of the oil mist, endotoxin, total bacteria and fungus in the work environment was TWA(8-hr) 0.531 mg/m3, 6.33 EU/m3, 100 CFU/m3 and 75 CFU/m3, respectively. The concentrations of the endotoxin, total bacteria and fungus within the metal working fluid was 1.5x10(4) EU/mL, 4.6x10(5) CFU/mL and 1.8x10(5) CFU/mL, respectively.
DISCUSSION
Although the patient did not receive a specific precipitating antibody test, the microbial concentration within the metal working fluid was higher than normal and similar to previous case reports, The oil mist level in the air exceeded the NIOSH REL and ACGIH NIC, and were similar or higher than previous cases. By excluding other causes of hypersensitivity pneumonitis, we concluded that the disease developed from exposure to microbial antigens in the metal working fluid.

Citations

Citations to this article as recorded by

Green manufacturing—performance of a biodegradable cutting fluid
Rahul Katna, Kanwarjeet Singh, Narayan Agrawal, Swati Jain
Materials and Manufacturing Processes.2017; 32(13): 1522. CrossRef
Association of Exposure to Chemicals with Dyspnea among Employed Workers: Analysis of the 3rdKorean Working Conditions Survey
Moon-Young Park, Sung-Ho Hwang, Kimyong Hong, Se-Eun Oh, Kyoung-Mu Lee
Journal of Korean Society of Occupational and Environmental Hygiene.2016; 26(1): 64. CrossRef
Microbial Assessment in Metal-Working Fluids Handling Industry
Hyunhee Park, Dongjin Park, Hae Dong Park
Journal of Korean Society of Occupational and Environmental Hygiene.2014; 24(3): 300. CrossRef
Microbial Exposure Assessment in Sawmill, Livestock Feed Industry, and Metal Working Fluids Handling Industry
Hyunhee Park, Haedong Park, Inseop Lee
Safety and Health at Work.2010; 1(2): 183. CrossRef

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First year report of analytical proficiency testing program for industrial hygiene laboratories: Dong Uk Park, Yong Chull Shin, Na Roo Lee, Se Min Oh, Kyu Chull Chung, Doo Yong Park; Korean Journal of Occupational and Environmental Medicine 1993;5(2):250-261. Published online September 30, 1993; DOI: https://doi.org/10.35371/kjoem.1993.5.2.250

Abstract PDF: No abstract available.

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